Producing microchips requires high precision, high speed and high acceleration. The field of linear motor drives par excellence. The famous Swiss international supplier of linear applications, W. Schneeberger AG, therefore asked Tecnotion to develop a linear motor system for their new XY-stage. The demands were high: for maximum acceleration W. Schneeberger AG wanted an efficient and extreme light linear motor. Tecnotion designed and built a special motor for this application. The result was as expected: a resolution of 0.1 µm and a repeatability of 0.52 at a maximum acceleration of 104 m/s², continuous 59 m/s² and a maximum velocity of 0.614 m/s. Both in the X and Y-stage!

The development of the stage is one example of the cooporation between the developers of Tecnotion and suppliers to the international semiconductor industry.