Vacuum motors

Low outgassing - High cleanliness

 
 

A direct sibling of our U-series, these vacuum rated ironless motors feature specifically designed coil units and magnet yokes for use in high vacuum, down to 10-8 mBar. 

Apart from the features carried over from our regular ironless motors: light weight and ultra precision, this series is also capable of incredibly smooth motion and achieves the lowest amount of outgassing possible for a series product of this type. The importance of low outgassing can be so crucial for certain applications, that we had this thoroughly tested and can even supply you with exact specifications and performance details, should you so desire.

 

UMV Series

UMV VacuumFp 400N .. Fc 80N

The UMV coils are the smallest coils in the vacuum rated linear motor series. This serie is ideal for positioning e.g. in gantries, or high dynamic, light weight applications which require extreme accuracy. 

ULV Series

ULV VacuumFp 720N .. Fc 150N

The ULV coils are the high end coils in the vacuum rated linear motor series. The ULV serie is commonly used for applications demanding peak force or low heat output. In longer strokes ULV coils can be combined to save magnet material but still achieve high performance.

UXXV Series

UXXV Vacuum Fp 4020N Fc 666N

The UXXV coil is the most powerful and efficient coil in the vacuum rated linear motor series. The UXXV series is ideal for heavy duty applications that demand ultra-precision and maximum force output. It’s efficiency and high motor constant allow for a low heat output while generating a high force.

Thermal management is one of the main challenges in vacuum. Therefore the coil units have been designed to achieve a low thermal resistance (Rth) to enable the coil unit to quickly conduct heat away from the coil. Integrated temperature and cut-off sensors guarantee thermal protection at all times.

Key industries that can benefit from these motors are, for instance:

  • Semiconductor
  • Flat Panel Display
  • Inspection stages
  • Lithography
  • E-beam / ion beam applications

So why choose for ironless vacuum rated?

  • Defined low outgassing
  • No particulation
  • High cleanliness
  • No large cable feed-through required 
  • Can be positioned anywhere in the vacuum chamber.

PRODUCTS

Ironless motors

Ironless motors have no attraction force or cogging between the coil unit and the magnet track. They… Read more

Torque motors

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