Vacuum linear motor

Linear motor solutions into vacuum

A growing amount of high tech applications require vacuum solutions to minimize the risk of unwanted chemical reactions or pollution of the process or surrounding equipment. Motion is one of the main challenges within a vacuum environment. Serviceability, reliability, versatility and outgassing are critical factors in vacuum applications.

Linear vacuum rated motors have no moving parts and are frictionless, making the motors maintenance free. Additionally Tecnotion’s linear motors can be placed into vacuum as a whole and therefore do not require a feed trough thus saving costs. Tecnotion´s vacuum rated ironless linear motor is a dedicated and specifically designed coil unit and magnet yoke for use in high vacuum, down to 10-8 mBar , and the lowest achievable outgassing for a series product. Tecnotion currently offers three types of vacuum linear motors

Vacuum rated Ironless linear motors for very high and low vacuum requirements.
Linear Motor Transport system using iron core or ironless motors.
Customized linear actuator designed to customer requirements and, if required, the highest specifications available on the market.

For more information about Tecnotion's vacuum motors please mail to sales@tecnotion.com.

Vacuum applications may be: Positioning stages & gantries, inspection, scribing, encapsulation, lithography, de-position processes, sputtering & E-beam.