Vacuum motor | Manual | 1.3
ULV – G2 series
High acceleration and dynamics
Ideal for applications that demand peak force or low heat output.
Ideal for applications that demand peak force or low heat output.

The Vacuum ULV – G2 series is the medium-size series in the high-end vacuum-rated linear motor series. They are commonly used for applications demanding peak force or low heat output.
Such as in lithography and inspection solutions. In longer strokes, ULV – G2 coils can be combined to save magnet material but still achieve high performance.
Coil units: ULV9 G2 N-Winding, ULV9 G2 S-Winding
Magnet yokes: ULV 126mm, ULV 420mm




Vacuum motor | Manual | 1.3
Vacuum motor | Brochure | 1.5
Ironless motor | Webinar | Version 1.0
Vacuum motor | Webinar | Version 1.0
Vacuum motor | CAD file | version 1.1
Vacuum motor | Spec sheet | 1.4
Tecnotion direct drive motors are seamlessly integrated into a wide variety of applications, such as semi-conductors, machine tooling, robotics, display applications and printing industry. We direct drive your motion technology.

Find the best linear motor according to your application criteria. Select a product type and choose relevant values to filter the most suitable motor.

Finding the right motor for a given application can be a daunting task. The online simulation tool is designed to make that process as easy as possible for you. Find the right motor in just 4 steps.


Mike Rolink and Stefan Jansen
Application Engineers
“Do you have a question about a motor? Or do you need technical support during an installation? Call us and one of our Application Engineers will help and support you throughout the entire process.”
Ask your question